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Advanced Processes for 193-nm Immersion Lithography (SPIE Press Monograph Vol. PM189)

Yayi Wei, Robert L. Brainard




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 | #2764149 in Books |  2009-02-23 | Original language:English |  10.00 x7.00 x.75l,1.25 | File type: PDF | 360 pages

||0 of 0 people found the following review helpful.| You can hold an overall view|By Hirotsugu Wada|I got this book to fill the ten years gap after retired from the Lithography. New technical terms and main issues are succinctly described. You can hold an overall view of the immersion lithography. Figures and photographs are very helpful to instinctively understand topics. Especially, measured or simulated graphs are very intere

This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the field as well as for current practitioners who want to broaden their understanding of this latest technology. The book can be used as course material for graduate students of electrical engineering, material sciences, physics, chemistry, and microelectronics engineering and can also be used to train engineers inv...

You can specify the type of files you want, for your device.Advanced Processes for 193-nm Immersion Lithography (SPIE Press Monograph Vol. PM189)   |  Yayi Wei, Robert L. Brainard. I was recommended this book by a dear friend of mine.

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