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Design for Manufacturability with Advanced Lithography

Bei Yu, David Z. Pan




[PDF.jd41] Design for Manufacturability with Advanced Lithography

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 | #5940626 in Books |  2015-11-07 | Original language:English | PDF # 1 |  9.21 x.44 x6.14l,.94 | File type: PDF | 164 pages

||From the Back Cover||This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).  The authors describe in detail a set of algorithms

This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM solutions fr...

You easily download any file type for your device.Design for Manufacturability with Advanced Lithography   |  Bei Yu, David Z. Pan. Just read it with an open mind because none of us really know.

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