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Microlithography: Science and Technology, Second Edition (Optical Science and Engineering)

From Brand: CRC Press




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 | #2179103 in Books |  CRC Press |  2007-05-11 | Original language:English | PDF # 1 |  10.02 x1.73 x7.31l,3.60 | File type: PDF | 864 pages

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|| ||Praise for the First Edition |"…The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts.

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